Laser Interference Lithography – Prof. Andrew Sarangan
Electron beam lithography EBL 1 2 3 4
Electron Beam Lithography System | Introduction to JEOL Products | JEOL Ltd.
High throughput optical lithography by scanning a massive array of bowtie aperture antennas at near-field | Scientific Reports
Forays through the lithography of microelectronics (Matthias Schirmer) - Allresist EN
Other photon-based lithographies 1.Near field optical lithography 2.Interference lithography 3.Phase-mask lithography 4.Laser beam direct writing and micro-mirror. - ppt download